HENAN UNIVERSITY | Engineering Research Center for Nanomaterials (ERCN)

National & Local Joint Engineering Research Center for Applied Technology of Hybrid Nanomaterials

Preparation equipment

High Vacuum Coating Plant

2018年05月18日 15:12  点击:[]

The device can be used to develop monolayer and multilayer functional films, such as hard films, metal films, semiconductor films, dielectric films, ferromagnetic films and magnetic films. It is a single room vertical structure with a high vacuum system pumped by a turbo molecular pump unit. It has the functions of magnetic filtered arc deposition, ion beam sputtering, ion beam assisted deposition and intermediate energy ion beam in the deposition chamber.


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